| Flow Range | -200SCCM to 200SCCM | |
| PCB changed | 6 | |
| HTS | 9026.80.20.00 | |
| ECCN (US) | EAR99 | |
| PPAP | No | |
| Package Length | 30.48 | |
| Maximum Operating Pressure | 25psi | |
| Automotive | No | |
| Pin Count | 6 | |
| Minimum Operating Temperature (°C) | -25 | |
| Mounting | Through Hole | |
| Maximum Operating Temperature (°C) | 85 | |
| Sensor Type | Mass | |
| Medium | Hydrogen | |
| Package Height | 31.5 | |
| Part Status | Active | |
| Maximum Operating Supply Voltage (V) | 15 | |
| Typical Operating Supply Voltage (V) | 10 | |
| EU RoHS | Compliant | |
| Package Width | 15.49 | |
| Minimum Operating Supply Voltage (V) | 8 |
